Microlithography process technology for IC fabrication
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
New York
McGraw Hill
1986
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| Subjects: | |
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| 100 | |a Elliott, D |9 81215 | ||
| 245 | 0 | |a Microlithography process technology for IC fabrication | |
| 260 | |a New York | ||
| 260 | |b McGraw Hill | ||
| 260 | |c 1986 | ||
| 300 | |a "xix,378p" | ||
| 650 | |a 2015 - 2016 / Degree College |9 81201 | ||
| 942 | |c BK | ||
| 999 | |c 505363 |d 505363 | ||
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